Liquid Metal Interdigitated Capacitive Strain Sensor with Normal Stress Insensitivity

Soft and stretchable sensors of strain are important for human–machine interfaces, soft robotics, electronic skins. However, generally cannot distinguish in-plane from normal stress. For example, stretching a sensor often gives similar signal to pressing the sensor. To solve this problem, liquid metal (LM)-interdigitated capacitive that is insensitive stress introduced. The contains LM-interdigitated electrodes prepared by vacuum filling LM into lithographically defined microchannels. capacitance between decreases with increasing due geometric changes. Because nature electrodes, exhibits high stretchability (100% strain) repeatability gauge factor −0.3. Due elasticity device, has low hysteresis (<1%) no crosstalk sensing. These types may find use in wearable devices.